Research Catalog

Metrology for submicrometer devices and circuits

Title
Metrology for submicrometer devices and circuits / W. Murry Bullis, Electron Devices Division, Center for Electronics and Electrical Engineering, National Engineering Laboratory, National Bureau of Standards.
Author
Bullis, W. Murray, 1930-
Publication
Washington : Department of Commerce, Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1980.

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Holdings

Details

Additional Authors
  • United States. National Bureau of Standards.
  • Center for Electronics and Electrical Engineering (U.S.). Electron Devices Division.
Series Statement
  • Semiconductor measurement technology
  • NBS special publication ; 400-61
Uniform Title
  • Semiconductor measurement technology.
  • NBS special publication ; 400-61.
Subjects
Note
  • Issued June 1980.
  • CODEN: XNBSAV
Bibliography (note)
  • Includes bibliograhical references.
OCLC
  • ocm06527685
  • SCSB-4355080
Owning Institutions
Columbia University Libraries