Research Catalog

Electron optical systems for microscopy, microanalysis & microlithography : proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD / edited by John J. Hren [and others].

Title
Electron optical systems for microscopy, microanalysis & microlithography : proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD / edited by John J. Hren [and others].
Publication
AMF O'Hare, IL : Scanning Electron Microscopy, Inc., [1984], ©1984.

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Details

Additional Authors
  • Hren, John J.
  • Pfefferkorn Conference (3rd : 1984 : Ocean City, Md.)
  • Scanning Electron Microscopy, Inc. http://id.loc.gov/authorities/names/n82205857
Description
vi, 272 pages, 2 unnumbered pages : illustrations; 28 cm
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0931288347
Owning Institutions
Columbia University Libraries