Research Catalog

Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. / editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.

Title
Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. / editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.
Publication
New York : North-Holland, [1983], ©1983.

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Details

Additional Authors
  • Brueck, S. R. J.
  • Osgood, R. M.
  • Schlossberg, H. R.
  • United States. Air Force. Office of Scientific Research. http://id.loc.gov/authorities/names/n79110283
Description
xiii, 298 pages : illustrations; 24 cm.
Series Statement
Materials Research Society symposia proceedings ; v. 17
Uniform Title
Materials Research Society symposia proceedings ; v. 17.
Subjects
Note
  • "Sponsored by the Air Force Office of Scientific Research"--T.p. verso.
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
0444007822 :
LCCN
83008028
Owning Institutions
Columbia University Libraries