Research Catalog

Micromachining and microfabrication process technology VIII : 27-29 January, 2003, San Jose, California, USA / John A. Yasaitis, Mary Ann Perez-Maher, Jean Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].

Title
Micromachining and microfabrication process technology VIII : 27-29 January, 2003, San Jose, California, USA / John A. Yasaitis, Mary Ann Perez-Maher, Jean Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].

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Details

Additional Authors
  • Karam, Jean-Michel.
  • Perez-Maher, Mary Ann.
  • Semiconductor Equipment and Materials International.
  • Society of Photo-optical Instrumentation Engineers.
  • Yasaitis, John.
Description
ix, 604 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 4979
Subject
  • Electromechanical devices > Design and construction > Congresses
  • Microfabrication > Congresses
  • Micromachining > Congresses
ISBN
081944779X
Owning Institutions
Columbia University Libraries