Research Catalog
2002 8th International Symposium on Plasma- and Process-Induced Damage : April 24-25, 2003, Corbeil-Essonnes, France / Koji Eriguchi, S. Krishnan, and Terence Hook, editors ; [technical co-sponsors, IEEE/Electron Devices Society, Japanese Society of Applied Physics].
- Title
- 2002 8th International Symposium on Plasma- and Process-Induced Damage : April 24-25, 2003, Corbeil-Essonnes, France / Koji Eriguchi, S. Krishnan, and Terence Hook, editors ; [technical co-sponsors, IEEE/Electron Devices Society, Japanese Society of Applied Physics].
- Author
- International Symposium on Plasma Process-Induced Damage (8th : 2003 : Corbeil-Essonnes, France)
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Use in library | TK7871.85 .I5834 2003g | Off-site |
Details
- Additional Authors
- Description
- [vi], 189 p. : ill.; 28 cm.
- Alternative Title
- PID
- Plasma process induced-damage
- Plasma- and process-induced damage
- Subjects
- ISBN
- 0780377478 (softbound ed.)
- LCCN
- 2002116918
- Owning Institutions
- Columbia University Libraries