Research Catalog

Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA / Alfred K.K. Wong, Kevin M. Monahan, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.

Title
Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA / Alfred K.K. Wong, Kevin M. Monahan, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash. : SPIE, c2003.

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Details

Additional Authors
  • Monahan, Kevin M.
  • Society of Photo-optical Instrumentation Engineers.
  • Wong, Alfred Kwok-Kit.
Description
vii, 186 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series, 0277-786X ; v. 5043
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5043.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819448486
Owning Institutions
Columbia University Libraries