Research Catalog

Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A. / editors: Duane S. Boning ... [et al.].

Title
Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A. / editors: Duane S. Boning ... [et al.].

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Details

Additional Authors
  • Boning, Duane S.
  • Materials Research Society. Meeting (2003 : San Francisco, Calif.)
  • Symposium on Chemical-Mechanical Planarization (2003 : San Francisco, Calif.)
Description
xi, 348 p. : ill.; 24 cm.
Series Statement
Materials Research Society symposium proceedings ; 767
Subjects
ISBN
1558997040
Owning Institutions
Columbia University Libraries