Research Catalog

Microsystems engineering : metrology and inspection III : 23-25 June, 2003, Munich, Germany / Christophe Gorecki, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by, EOS--European Optical Society, WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany).

Title
Microsystems engineering : metrology and inspection III : 23-25 June, 2003, Munich, Germany / Christophe Gorecki, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by, EOS--European Optical Society, WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany).

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Details

Additional Authors
  • European Optical Society.
  • Gorecki, Christophe.
  • Society of Photo-optical Instrumentation Engineers.
  • Wissenschaftliche Gesellschaft Lasertechnik.
Description
ix, 210 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 5145
Alternative Title
Metrology and inspection
Subjects
ISBN
0819450154
Owning Institutions
Columbia University Libraries