Research Catalog

CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A. / editors, Tsu-Jae King ... [et al.].

Title
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A. / editors, Tsu-Jae King ... [et al.].

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Details

Additional Authors
  • Liu, Tsu-Jae King.
  • Materials Research Society. Meeting (2003 : San Francisco, Calif.)
  • Symposium on CMOS Front-End Materials and Process Technology (2003 : San Francisco, Calif.)
Description
xi, 308 p. : ill.; 24 cm.
Series Statement
Materials Research Society symposium proceedings ; v. 765
Subject
  • Dielectrics > Congresses
  • Gate array circuits > Materials > Congresses
  • Metal oxide semiconductors > Materials > Congresses
  • Metal oxide semiconductors, Complementary > Materials > Congresses
  • Nanostructured materials > Congresses
ISBN
1558997024
Owning Institutions
Columbia University Libraries