Research Catalog
RTP 2003 : 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors : September 23-26, 2003, the Westin Francis Marion Hotel, Charleston, SC
- Title
- RTP 2003 : 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors : September 23-26, 2003, the Westin Francis Marion Hotel, Charleston, SC / editors, J. Gelpey ... [et al.] ; IEEE EDS.
- Author
- International Conference on Advanced Thermal Processing of Semiconductors (11th : 2003 : Charleston, S.C.)
- Publication
- Piscataway, N.J. : IEEE, c2003.
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Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Text | Use in library | TK7871.85 .I46 2003g | Off-site |
Details
- Additional Authors
- Description
- xi, 220 p. : ill.; 28 cm.
- Alternative Title
- Advanced thermal processing of semiconductors
- Subjects
- Note
- "IEEE Catalog Number: 03EX696"--T.p. verso.
- Bibliography (note)
- Includes bibliographical references.
- Additional Formats (note)
- Also available via the World Wide Web.
- ISBN
- 0780378741
- LCCN
- 2003078741
- OCLC
- ocm53323576
- SCSB-4838616
- Owning Institutions
- Columbia University Libraries