Research Catalog

RTP 2003 : 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors : September 23-26, 2003, the Westin Francis Marion Hotel, Charleston, SC

Title
RTP 2003 : 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors : September 23-26, 2003, the Westin Francis Marion Hotel, Charleston, SC / editors, J. Gelpey ... [et al.] ; IEEE EDS.
Author
International Conference on Advanced Thermal Processing of Semiconductors (11th : 2003 : Charleston, S.C.)
Publication
Piscataway, N.J. : IEEE, c2003.

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TextUse in library TK7871.85 .I46 2003gOff-site

Details

Additional Authors
  • Gelpey, Jeffrey C.
  • IEEE Electron Devices Society
Description
xi, 220 p. : ill.; 28 cm.
Alternative Title
Advanced thermal processing of semiconductors
Subjects
Note
  • "IEEE Catalog Number: 03EX696"--T.p. verso.
Bibliography (note)
  • Includes bibliographical references.
Additional Formats (note)
  • Also available via the World Wide Web.
ISBN
0780378741
LCCN
2003078741
OCLC
  • ocm53323576
  • SCSB-4838616
Owning Institutions
Columbia University Libraries