Research Catalog
Chemical vapor deposition polymerization : the growth and properties of parylene thin films
- Title
- Chemical vapor deposition polymerization : the growth and properties of parylene thin films / by Jeffrey B. Fortin, Toh-Ming Lu.
- Author
- Fortin, Jeffrey B.
- Publication
- Boston : Kluwer Academic Publishers, c2004.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Use in library | TS695 .F67 2004 | Off-site |
Details
- Additional Authors
- Lu, T.-M. (Toh-Ming), 1943-
- Description
- xvi, 102 p. : ill.; 25 cm.
- Subjects
- Bibliography (note)
- Includes bibliographical references (p. [91]-99) and index.
- Contents
- 1. Introduction -- 2. Deposition Equipment -- 3. Step-by-Step Guide to Depositing Perylene -- 4. Perylene-N Precursor Chemistry -- 5. Deposition Kinetics for Polymerization via the Gorham Route -- 6. Film Properties -- 7. Other CVD Polymers.
- ISBN
- 1402076886
- LCCN
- 2003065275
- OCLC
- ocm53156157
- SCSB-4848023
- Owning Institutions
- Columbia University Libraries