Research Catalog

Advances in mirror technology for X-ray, EUV lithography, laser and other applications : 7-8 August 2003, San Diego, California, USA / Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.

Title
Advances in mirror technology for X-ray, EUV lithography, laser and other applications : 7-8 August 2003, San Diego, California, USA / Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.

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Details

Additional Authors
  • Dinger, Udo.
  • Khounsary, Ali M.
  • Ota, Kazuya.
  • Society of Photo-optical Instrumentation Engineers.
Description
ix, 222 p. : ill. (some col.); 28 cm.
Series Statement
SPIE proceedings series, 0277-786X ; v. 5193
Subject
  • Lasers > Mirrors > Design and construction > Congresses
  • Mirrors > Design and construction > Congresses
  • Optical coatings > Congresses
  • Optical radiometry > Congresses
ISBN
0819450669
Owning Institutions
Columbia University Libraries