Research Catalog

Micromachining and microfabrication process technology IX : 27-29 January 2004, San Jose, California, USA / Mary Ann Maher, Jerome F. Jakubczak, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.

Title
Micromachining and microfabrication process technology IX : 27-29 January 2004, San Jose, California, USA / Mary Ann Maher, Jerome F. Jakubczak, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE, c2004.

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Details

Additional Authors
  • Jakubczak, Jerome Florian.
  • Perez-Maher, Mary Ann.
  • Society of Photo-optical Instrumentation Engineers.
Description
xxii, 276 p. : ill. (some col.); 28 cm.
Series Statement
SPIE proceedings series, 0277-786X ; v. 5342
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5342.
Subject
  • Electromechanical devices > Design and construction > Congresses
  • Microfabrication > Congresses
  • Micromachining > Congresses
Bibliography (note)
  • Includes bibliographical references and author index.
ISBN
0819452505
Owning Institutions
Columbia University Libraries