Research Catalog
Journal of microlithography, microfabrication, and microsystems : JM³.
- Title
- Journal of microlithography, microfabrication, and microsystems : JM³.
Items in the Library & Off-site
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2 Items
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Use in library | TK7874 .J6668 v.2 (2003) | Off-site | |
| Text | Use in library | TK7874 .J6668 v.3 (2004) | Off-site |
Details
- Additional Authors
- Society of Photo-optical Instrumentation Engineers.
- Description
- v. : ill.; 29 cm.
- Alternative Title
- J. microlithogr., microfabr., microsyst.
- JM3
- Journal of microlithography, microfabrication, and microsystems
- Subject
- ISSN
- 1537-1646
- LCCN
- 2001211284
- Owning Institutions
- Columbia University Libraries