Research Catalog

Introduction to microfabrication

Title
Introduction to microfabrication / Sami Franssila.
Author
Franssila, Sami
Publication
Chichester, West Sussex, England ; Hoboken, NJ : J. Wiley, c2004.

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TextUse in library TK7875 .F73 2004Off-site

Details

Description
xvii, 401 p. : ill.; 26 cm.
Subject
  • Microelectromechanical systems
  • Electronic apparatus and appliances
  • Microfabrication
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
  • 0470851058 (cloth)
  • 0470851066 (pbk.)
LCCN
2004004940
OCLC
  • ocm53912486
  • SCSB-5056615
Owning Institutions
Columbia University Libraries