Research Catalog

Optical microlithography XVII : 24-27 February 2004, Santa Clara, California, USA / Bruce W. Smith, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH.

Title
Optical microlithography XVII : 24-27 February 2004, Santa Clara, California, USA / Bruce W. Smith, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH.
Publication
Bellingham, Wash., USA : SPIE, c2004.

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Details

Additional Authors
  • International SEMATECH.
  • Semiconductor Equipment and Materials International.
  • Smith, Bruce W., 1959-
  • Society of Photo-optical Instrumentation Engineers.
Description
3 v. (xxiii, 1314 p.) : ill. (some col.); 28 cm.
Series Statement
SPIE proceedings series ; v. 5377
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5377.
Alternative Title
  • Optical microlithography 17
  • Optical microlithography seventeen
Subject
  • Integrated circuits > Masks > Congresses
  • Manufacturing processes > Congresses
  • Microlithography > Congresses
  • X-ray lithography > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819452904 (set)
Owning Institutions
Columbia University Libraries