Research Catalog

Emerging lithographic technologies VIII : 24-26 February, 2004, Santa Clara, California, USA / R. Scott Mackay, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, [and] International SEMATECH.

Title
Emerging lithographic technologies VIII : 24-26 February, 2004, Santa Clara, California, USA / R. Scott Mackay, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, [and] International SEMATECH.
Publication
Bellingham, Wash., USA : SPIE, c2004.

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Details

Additional Authors
  • International SEMATECH.
  • Mackay, R. Scott.
  • Semiconductor Equipment and Materials International.
  • Society of Photo-optical Instrumentation Engineers.
Description
2 v. (xxxviii, 1110 p.) : ill.; 28 cm.
Series Statement
Proceedings of SPIE, 0277-786X ; v. 5374
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5374.
Alternative Title
  • Emerging lithographic technologies 8
  • Emerging lithographic technologies eight
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819452874
Owning Institutions
Columbia University Libraries