Research Catalog

Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California / Kevin M. Monahan, chairman/editor ; cooperating organizations, Optical Sciences Center/University of Arizona, Institute of Optics/University of Rochester.

Title
Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California / Kevin M. Monahan, chairman/editor ; cooperating organizations, Optical Sciences Center/University of Arizona, Institute of Optics/University of Rochester.

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Details

Additional Authors
  • Monahan, Kevin M.
  • Society of Photo-optical Instrumentation Engineers.
  • University of Arizona. Optical Sciences Center.
  • University of Rochester. Institute of Optics.
Description
vi, 223 p. : ill.; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 565
Subjects
ISBN
0892526009 (pbk.)
LCCN
85062883
Owning Institutions
Columbia University Libraries