Research Catalog

Optical micro- and nanometrology in manufacturing technology : 29-30 April, 2004, Strasbourg, France

Title
Optical micro- and nanometrology in manufacturing technology : 29-30 April, 2004, Strasbourg, France / Christophe Gorecki, Anand K. Asundi, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE, [2004], ©2004.

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Details

Additional Authors
  • Gorecki, Christophe.
  • Asundi, Anand.
  • Society of Photo-optical Instrumentation Engineers.
Description
vii, 300 pages : illustrations; 28 cm.
Series Statement
Proceedings of SPIE, 0277-786X ; v. 5458
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5458.
Subject
ISBN
0819453803
OCLC
  • ocm56769585
  • SCSB-5075547
Owning Institutions
Columbia University Libraries