Research Catalog

MEMS, MOEMS, and micromachining : 29-30 April, 2004, Strasbourg, France

Title
MEMS, MOEMS, and micromachining : 29-30 April, 2004, Strasbourg, France / Hakan Ürey, Ayman El-Fatatry, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE, [2004], ©2004.

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Details

Additional Authors
  • Urey, Hakan, 1970-
  • El-Fatatry, Ayman.
  • Society of Photo-optical Instrumentation Engineers.
Description
xi, 438 pages : illustrations; 28 cm.
Series Statement
Proceedings of SPIE, 0277-786X ; v. 5455
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5455.
Subjects
ISBN
0819453781
OCLC
  • ocm56771601
  • SCSB-5075553
Owning Institutions
Columbia University Libraries