Research Catalog

Title

Micro- and nanosystems : symposium held December 1-3, 2003, Boston, Massachusetts, USA / editors, David A. LaVan [and others].

Publication

Warrendale, Pa. : Materials Research Society, [2004], ©2004.

Items in the Library & Off-site

Holdings

Details

Additional Authors

• LaVan, David A.
• Materials Research Society. Fall Meeting (2003 : Boston, Mass.)
• Symposium on Micro- and Nanosystems (2003 : Boston, Mass.)

Description

xv, 483 pages : illustrations; 24 cm.

Series Statement

Materials Research Society symposia proceedings ; v. 782

Uniform Title

Materials Research Society symposia proceedings ; v. 782.

Subject

• Microelectromechanical systems > Congresses
• Nanotechnology > Congresses

Note

• "This proceedings reports on research presented at Symposium A, 'Micro- and Nanosystems, ' held December 1-3 at the 2003 MRS Fall Meeting in Boston, Massachusetts."--P. xv.

Bibliography (note)

• Includes bibliographical references and indexes.

Contents

• Developing nanoscale materials using biomimetic assembly processes / George D. Bachand, Susan B. Rivera, Andrew K. Boal, Joseph M. Bauer, Steven J. Koch, Ronald P. Manginell, Jun Liu and Bruce C. Bunker -- Carbon nanotube modification using BaF[subscript 2] vapor in ultra-high vacuum environment / Francisco Santiago, Victor H. Gehman, Jr., Karen Long and Kevin A. Boulais -- Tunneling current-distance characteristic of scanning vibrating probe/1-alkanethiol self-assembled monolayer (SAM)/Au (111) structure / Yuhsuke Yasutake, Yasuo Azuma, Kouhei Nagano and Yutaka Majima -- Poly-SiGe : a superb material for MEMS / Ann Witvrouw, Maria Gromova, Anshu Mehta, Sherif Sedky, Piet De Moor, Kris Baert and Chris van Hoof -- Fabrication of micro- and nanoscale SiC structures using selective deposition processes / L. Chen, X. A. Fu, C. A. Zorman and M. Mehregany -- Optimization of poly-SiGe deposition processes for modular MEMS integration / Blake C.-Y. Lin, Tsu-Jae King and Roger T. Howe -- Thin-film electrostatic actuators on flexible plastic substrates / J. Gaspar, V. Chu and J. P. Conde -- Scanning probe characterization of localized pH changes on a sapphire surface in the presence of an applied field / Joseph W. Bullard, Ryan J. Kershner and Michael J. Cima -- Monolithic three-dimensional integration of micro-fluidic channels and optical waveguides in fused silica / Yves Bellouard, Ali Said, Mark Dugan and Philippe Bado -- Damage and failure mechanisms in high pressure silicon-glass-metal microfluidic connections / Dong-Jin Shim, Hong-Wei Sun, Srikar T. Vengallatore and S. Mark Spearing -- Nanostructured materials for microfluidic sensing application / Nancy N. Kariuki, Laura Moussa, Tanya Menard, Asif Hassan, Li Han, Elizabeth Crew, Jin Luo and Chuan-Jian Zhong -- Characterization of 0.5 MHz silicon-based ultrasonic nozzles using multiple Fourier horns / Shirley C. Tsai, Yu L. Song, Yuan F. Chou, Terry K. Tseng, W. J. Chen, J. H. Yang, J. W. Chen and Chen S. Tsai -- A scheme of micromanipulation using a liquid bridge / Kenichi J. Obata, Shigeki Saito and Kunio Takahashi -- Characterization of electrostatic micromembrane actuator performance using a mass probing method / Xingtao Wu, Jeremy Hui, Pat Kayatta, Dedeian Kenneth, Mariam Young and Cardinal Warde -- Polymer microvalve based on anisotropic expansion of polypyrrole / Yevgeny Berdichevsky and Y.-H. Lo -- Self-organized criticality in nanotribology / Micha Adler, John Ferrante, Alan Schilowitz, Dalia Yablon and Fredy Zypman -- Optimization of mesoporous silicon microcavities for proteomic sensing / L. A. DeLouise and B. L. Miller -- Thermal effects in plasma treatment of patterned PDMS for bonding stacked channels / Jin Zou and Peter Y. Wong -- Statistical thermodynamics of two-dimensional fluids of solid nanoparticles / Liudmila A. Pozhar and John Maguire -- Single osteoblast chemical sensor via non-invasive bio-electronic interface / Mo Yang, Xuan Zhang, Bonnie Kohr, Andre Morgan and Cengiz S. Ozkan -- Ellipsometry measurement accuracy of gate oxides under polysilicon / Gary Jiang, Don Pelcher, Daewon Kwon, Jana Clerico and George Collins -- Controlling the position and morphology of nanotubes within a polymer thin film / Emer Lahiff, Andrew I. Minett, Seamus Curran, Chang Y. Ryu, Werner J. Blau and Pulickel M. Ajayan -- Fabrication of micro-contact probe using Mo-Cr spring with Au plating bump / Chinami Kaneshiro and Kohji Hohkawa -- Microwave molecular sieves synthesis and capillary crystal growth by geometric confinement / Steven B. Ogunwumi, John F. Wight and James C. Fajardo -- Micromechanical characterization of GaSb by microbeam deflection and using nanoprobe and finite element analysis / M. Ospina, S. R. Vangala, D. Yang, J. A. Sherwood, C. Sung and W. D. Goodhue -- 3D small angle x-ray scattering (SAXS) on deformed PVDF foils / Guenther Maier, Gernot Wallner and Peter Fratzl -- Effects of softbake parameters on a benzocyclobutene (BCB) adhesive wafer bond / Daniel N. Pascual -- Characterization of mechanical properties of silicon nitride thin films for space applications / Wen-Hsien Chuang, Thomas Luger, Rainer K. Fettig and Reza Ghodssi -- Polyurethane nanofiber webs for sensor and actuator applications in microelectromechanical systems (MEMS) / Mustafa M. Demir, Mansoor Naseer, Thomas F. Bechteler, Yasar Gurbuz and Yusuf Z. Menceloglu -- Ceramic microfabrication techniques for microdevices with three-dimensional architecture / Balakrishnan Nair, Merrill Wilson, Akash Akash, Joe Crandall, Charles Lewinsohn, Raymond Cutler and Marc Flinders -- Localized, In Situ vacuum measurements for MEMS packaging / Nicholas Moelders, James T. Daly, Anton C. Greenwald, Edward A. Johnson, Mark P. McNeal, Ramesh Patel, Martin U. Pralle and Irina Puscasu -- Electromechanical behavior in micromachined piezoelectric membranes / M. C. Robinson, J. C. Raupp, I. Demir, C. D. Richards, R. F. Richards and D. F. Bahr -- Structural and morphological study of zirconia and titania sol-gel monolayered films supported on soda-lime glass substrates / Luisa F. Cueto, Enrique Sanchez, Leticia M. Torres-Martinez and Gustavo A. Hirata -- Dissipation mechanisms in thin-film silicon microresonators on glass substrates / J. Gaspar, V. Chu and J. P. Conde -- Cavitation erosion and friction behavior of stainless steel as a function of grain size / Giuseppe Bregliozzi, Syed Imad-Uddin Ahmed, Andrea Di Schino, Jose M. Kenny and Henry Haefke -- Layer-by-layer engineered microreactors for bio-polymerization of 4-(2-aminoethyl) phenol hydrochloride / R. Ghan, T. Shutava, A. Patel, V. John and Y. Lvov -- Effect of polymer substrates on nano scale hot embossing / Jin-Hyung Lee, Hyun-Woo Lim, Jin-Goo Park, Eun-Kyu Lee and Yangsun Kim -- Evaluation of design and performance of a cryogenic MEMS micropump realized with Si-based diaphragm using combination of ZYGO/WYKO interferometer and Raman spectroscopy / Yi Zhao, Daryl Ludlow, Biao Li and Xin Zhang -- Adhesion force and nanotribological characteristics of chemical vapor deposited fluorocarbon films / Nam-Kyun Kim, Tae-Gon Kim, Jin-Goo Park, Woon-Bae Kim and Hyung-Jae Shin -- A novel AFM chip for foundation pen nanolithography - design and microfabrication / Keun-Ho Kim, Nicolaie Moldovan, Changhong Ke and Horacio D. Espinosa -- Novel electro-optic ceramic materials for microchip and high power lasers / Xuesheng Chen, Kewen Li, Kevin Zou, Run Zhang, Hua Jiang, Gonul Ozen and B. Di Bartolo -- 2D InP etching simulation under high density plasma of chlorine / A. Rhallabi, B. Liu, G. Marcos and J. P. Landesman -- Interface adhesion and reliability of microsystem packaging / Marvin I. Francis, Kellen Wadach, Satyajit Walwadkar and Junghyun Cho -- Pattern formation in directional solidification / Mike Greenwood, Mikko Haataja and Nikolas Provatas -- Field emission from the carbon nanotubes grown over cylindrical surface / D. Sarangi and A. Karimi -- Electrical characterization of BCB for electrostatic microelectromechanical devices / Alireza Modafe, Nima Ghalichechian, Benjamin Kleber and Reza Ghodssi -- Measurement of shape and deformation of MEMS at the wafer level / Cosme Furlong, Curtis F. Ferguson, Michael J. Melson and Ryszard J. Pryputniewicz -- Evolution of mesas on Si(111) surface under sublimation : nanofabrication through the control of atomic steps / Kee-Chul Chang and Jack M. Blakely -- Application of FIB/SEM and TEM to bit failure analyses in SRAM arrays / Wentao Qin, Alex Volinsky, Larry Rice, Lorraine Johnston and David Theodore -- Study of high aspect ratio etching in silicon by a mixture of SF[subscript 6]/O[subscript 2] using a 2D model based on a Monte Carlo approach / G. Marcos, A. Rhallabi and P. Ranson -- Advanced anodic bonding processes for MEMS applications / V. Dragoi, P. Lindner, T. Glinsner, M. Wimplinger and S. Farrens -- Mechanical characterizations of laser microwelds for MEMS packaging / Wei Han and Ryszard J. Pryputniewicz --
• Formation of a Ba-Te surface on GaAs / Kevin A. Boulais, Francisco Santiago, Karen J. Long and Victor H. Gehman -- Study of the pull-in voltage for MEMS parallel plate capacitor actuators / Emmanuel Saucedo-Flores, Ruben Ruelas, Martin Flores and Jung-Chih Chiao -- Resist poisoning-free advanced PECVD-based anti-reflective coating (ARC) for 90 nm technology and beyond / Sang H. Ahn, Sudha Rathi, Jean Liu, Heraldo Botelho, Wendy Yeh, Martin Seamons, Derek Witty and Hichem M'Saad -- Thermophysical properties of Ni films for LIGA microsystems / Diana-Andra Borca-Tasciuc, Rajesh Nimbalkar, Gang Chen, Samuel Graham and Theodorian Borea-Tasciuc -- Mechanical properties of metallic thin films : tensile tests vs. indentation tests / Nian Zhang, Changjin Xie and Wei Tong -- Electrical porous silicon microarray for DNA hybridization detection / Marie Archer, Marc Christophersen, Philippe M. Fauchet, Deoram Persaud and Karl D. Hirschman -- Potentiometric detection of DNA molecules hybridization using gene field effect transistor and intercalator / Toshiya Sakata, Hidenori Otsuka and Yuji Miyahara -- Control of stress in a metal-nitride-metal sandwich for CMOS-compatible surface micromachining / Rhodri R. Davies, David J. Combes, Mark E. McNie and Kevin M. Brunson -- Microfrictional properties of titanium carbide / Syed Imad-Uddin Ahmed, Giuseppe Bregliozzi and Henry Haefke -- Ferroelectric lead zirconate titanate and barium titanate nanoshell tubes / Yun Luo, Izabela Szafraniak, Valanoor Nagarajan, Ralf B. Wehrspohn, Martin Steinhart, Joachim H. Wendorff, Nicolai D. Zakharov, Ramamoorthy Ramesh and Marin Alexe -- Gas adsorption evidence of single-wall and multi-wall carbon nanotube opening / Moulay-Rachid Babaa, Edward McRae, Nicole Dupont-Pavlovsky, Sandrine Delpeux, Francois Beguin, Fabrice Valsaque and Jaafar Ghanbaja -- Fabrication and RF properties of titanium carbide/gold coplanar waveguides for RF MEMS applications / G. Radhakrishnan, R. E. Robertson, P. M. Adams, S. S. Osofsky and K. S. MacGowan -- Characterization and modeling of wafer and die level uniformity in deep reactive ion etching (DRIE) / Hongwei Sun, Tyrone Hill, Martin Schmidt and Duane Boning -- Non-impact electrostatic micromanipulation by voltage sequence for time / Shigeki Saito, Kunio Takahashi and Masataka Urago -- Evaluating the mechanical properties of MEMS by combining the resonance frequency and microtensile methods / Dongil Son, Jong-jin Kim, Dong Won Kim, Tae Won Lim and Dongil Kwon -- Direct writing of 3D microstructures using a scanning laser system / Hui Yu, Alexander Gruntzig, Yi Zhao, Andre Sharon, Biao Li and Xin Zhang -- Measurement of work of adhesion on wafers for direct bonding / Kevin T. Turner and S. Mark Spearing -- Semiconductor surface-molecule interactions : a case study in the wet etching of InP by [alpha]-hydroxy acids / Prabhakar Bandaru.

ISBN

1558997202

LCCN

2004301731

OCLC

• ocm55482638
• SCSB-5078765

Owning Institutions

Columbia University Libraries