Research Catalog

Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

Title
Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, Richard B. Fair, Charles W. Pearce, Jack Washburn.
Publication
Pittsburgh, Pa. : Materials Research Society, [1985], ©1985.

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Details

Additional Authors
  • Fair, Richard B.
  • Pearce, Charles W.
  • Washburn, Jack, 1921-
  • Materials Research Society. Fall Meeting (1984 : Boston, Mass.)
  • Symposium on Impurity Diffusion and Gettering in Semiconductors (1984 : Boston, Mass.)
Description
xiii, 284 pages; 24 cm.
Series Statement
Materials Research Society symposia proceedings, 0272-9172 ; v. 36
Uniform Title
Materials Research Society symposia proceedings ; v. 36.
Subject
  • Semiconductors > Defects > Congresses
  • Diffusion > Congresses
  • Semiconductor doping > Congresses
  • Getters > Congresses
Note
  • "Proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors ... held as Symposium C at the Materials Research Society Meeting, November 27-30, 1984 in Boston"--Acknowledgments.
Bibliography (note)
  • Includes bibliographies and indexes.
ISBN
0931837014 :
LCCN
85007226
OCLC
  • 11971128
  • ocm11971128
Owning Institutions
Columbia University Libraries