Research Catalog

Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

Title
Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, R.P.H. Chang, B. Abeles.
Publication
Pittsburgh, Pa. : Materials Research Society, [1985], ©1985.

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Details

Additional Authors
  • Chang, R. P. H. (Robert Pang Heng), 1941-
  • Abeles, Benjamin, 1925-
  • Symposium on Plasma Synthesis and Etching of Electronic Materials (1984 : Boston, Mass.)
Description
xv, 522 pages : illustrations; 24 cm.
Series Statement
Materials Research Society symposia proceedings ; v. 38
Uniform Title
Materials Research Society symposia proceedings ; v. 38.
Subjects
Note
  • Papers presented at the Symposium on Plasma Synthesis and Etching of Electronic Materials held in Boston, Mass. on Nov. 27-30, 1984.
Bibliography (note)
  • Includes bibliographies and indexes.
ISBN
0931837030 :
LCCN
85003085
OCLC
  • 11784552
  • ocm11784552
Owning Institutions
Columbia University Libraries