Research Catalog

Title

Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski.

Author

Lyshevski, Sergey Edward.

Publication

Boca Raton, Fla. : CRC Press, [2005], ©2005.

Items in the Library & Off-site

Holdings

Details

Description

722 pages : illustrations; 26 cm.

Summary

"Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in a textbook style and now includes homework problems, examples, and reference lists. It is designed to satisfy the growing demands of undergraduate and graduate students, researchers, and professionals in the fields of nano- and microengineering, and to enable everyone to contribute to the nanotechnology revolution."--BOOK JACKET.

Series Statement

Nano- and microscience, engineering, technology, and medicine series

Uniform Title

Nano- and microscience, engineering, technology, and medicine series.

Subjects

• Nanotechnology
• Microelectromechanical systems

Bibliography (note)

• Includes bibliographical references and index.

Contents

1. Nano- and microscience, engineering, and technology -- 2. Nano- and microscale systems, devices, and structures -- 3. Nano- and microsystems : classification and consideration -- 4. Fundamentals of microfabrication and MEMS fabrication technologies -- 5. Devising and synthesis of NEMS and MEMS -- 6. Modeling of micro- and nanoscale electromechanical systems and devices -- 7. Quantum mechanics and its applications -- 8. Molecular and carbon nanoelectronics -- 9. Control of MEMS and NEMS -- 10. Examples in synthesis, analysis, design and fabrication of MEMS.

ISBN

0849328381 (alk. paper)

LCCN

2004057931

OCLC

• ocm56214769
• SCSB-5166198

Owning Institutions

Columbia University Libraries