Research Catalog

Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, the Hague, the Netherlands

Title
Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, the Hague, the Netherlands / Harry L. Stover, Steven Wittekoek, chairs/editors ; organized by ANRT--Association nationale de la recherche technique, SPIE--the International Society for Optical Engineering ; cooperating sponsors, Comité Belge d'Optique [and others].
Publication
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1987], ©1987.

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Details

Additional Authors
  • Stover, Harry L.
  • Wittekoek, Steven.
  • Association nationale de la recherche technique.
  • Society of Photo-optical Instrumentation Engineers.
  • Comité belge d'optique.
Description
x, 211 pages : illustrations; 28 cm.
Series Statement
Proceedings / SPIE ; v. 811
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 811.
Subject
  • Microlithography > Congresses
  • Integrated circuits > Design and construction > Congresses
Bibliography (note)
  • Includes bibliographies and index.
ISBN
089252846X
LCCN
87061561
OCLC
  • 16880771
  • ocm16880771
Owning Institutions
Columbia University Libraries