Research Catalog

Advanced processing of semiconductor devices : 23-25 March, 1987, Bay Point, Florida

Title
Advanced processing of semiconductor devices : 23-25 March, 1987, Bay Point, Florida / Sayan D. Mukherjee editor ; sponsored by SPIE-the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society.
Publication
Bellingham, Wash., USA : The Society, [1987], ©1987.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
How do I pick up this item and when will it be ready?
TextRequest in advance TK7871.85 .A323 1987gOff-site

Holdings

Details

Additional Authors
  • Mukherjee, Sayan D.
  • Metallurgical Society (U.S.)
  • Society of Photo-optical Instrumentation Engineers.
Description
x, 366 pages : illustrations; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 797
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 797.
Subjects
Bibliography (note)
  • Includes bibliographies and index.
ISBN
089252832X
LCCN
87061010
OCLC
  • 506124244
  • ocn506124244
Owning Institutions
Columbia University Libraries