Research Catalog

Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March 1987, Bay Point, Florida

Title
Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March 1987, Bay Point, Florida / O.J. Glembocki, Fred H. Pollak, J.J. Song, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society.
Publication
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1987], ©1987.

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Additional Authors
  • Glembocki, O. J.
  • Pollak, Fred H.
  • Song, J. J.
  • Society of Photo-optical Instrumentation Engineers.
  • Metallurgical Society (U.S.)
Description
vi, 282 pages : illustrations; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 794
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 794.
Subject
  • Semiconductors > Optical methods > Congresses
  • Semiconductors > Optical properties > Congresses
Bibliography (note)
  • Includes bibliographies and index.
ISBN
089252829X (pbk.)
LCCN
87061007
OCLC
  • 506124326
  • ocn506124326
Owning Institutions
Columbia University Libraries