Research Catalog

Principles of plasma discharges and materials processing

Title
Principles of plasma discharges and materials processing / Michael A. Lieberman, Allan J. Lichtenberg.
Author
Lieberman, M. A. (Michael A.)
Publication
Hoboken, N.J. : Wiley-Interscience, [2005], ©2005.

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Additional Authors
Lichtenberg, Allan J.
Description
xxxv, 757 pages : illustrations; 25 cm
Summary
"The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals." "The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters." "With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever."--BOOK JACKET.
Subject
  • Plasma dynamics
  • Thin films > Surfaces
  • Plasma etching
  • Plasma chemistry > Industrial applications
Bibliography (note)
  • Includes bibliographical references (p. 735-748) and index.
Contents
1. Introduction -- 2. Basic plasma equations and equilibrium -- 3. Atomic collisions -- 4. Plasma dynamics -- 5. Diffusion and transport -- 6. Direct current (DC) sheaths -- 7. Chemical reactions and equilibrium -- 8. Molecular collisions -- 9. Chemical kinetics and surface processes -- 10. Particle and energy balance in discharges -- 11. Capacitive discharges -- 12. Inductive discharges -- 13. Wave-heated discharges -- 14. Direct current (DC) discharges -- 15. Etching -- 16. Deposition and implantation -- 17. Dusty plasmas -- 18. Kinetic theory of discharges -- App. A. Collision dynamics -- App. B. The collision integral -- App. C. Diffusion solutions for variable mobility model.
ISBN
0471720011 (acid-free paper)
LCCN
2004058503
OCLC
  • ocm56752658
  • SCSB-5183814
Owning Institutions
Columbia University Libraries