Research Catalog

Semiconductor silicon 1986 : proceedings of the Fifth International Symposium on Silicon Materials Science and Technology

Title
Semiconductor silicon 1986 : proceedings of the Fifth International Symposium on Silicon Materials Science and Technology / edited by Howard R. Huff, Takao Abe, Bernd Kolbesen ; Electronics and Dielectrics and Insulation Divisions [sponsors].
Author
International Symposium on Silicon Materials Science and Technology (5th : 1986 : Boston, Mass.)
Publication
Pennington, NJ : Electrochemical Society, [1986], ©1986.

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Details

Additional Authors
  • Huff, Howard R.
  • Electrochemical Society. Electronics Division.
  • Electrochemical Society. Dielectrics and Insulation Division.
Description
xiv, 1096 pages : illustrations; 23 cm.
Series Statement
Proceedings (Electrochemical Society) ; v. 86-4
Uniform Title
Proceedings (Electrochemical Society) ; v. 86-4.
Subjects
Note
  • Held 5-9 May, 1986 in Boston.
Bibliography (note)
  • Includes bibliographical references and indexes.
LCCN
86080802
OCLC
  • 35442422
  • ocm35442422
Owning Institutions
Columbia University Libraries