Research Catalog

Title

Plasma electronics : applications in microelectronic device fabrication / T. Makabe, Z. Petrović.

Author

Makabe, T. (Toshiaki)

Publication

New York : Taylor & Francis, 2006.

Items in the Library & Off-site

Holdings

Details

Additional Authors

Petrović, Z.

Description

339 pages : illustrations; 25 cm.

Summary

"Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagnosis. Plasma Electronics: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods necessary to bring these technologies from the laboratory to the factory."--BOOK JACKET.

Series Statement

Series in plasma physics

Uniform Title

Series in plasma physics.

Subject

Plasma engineering

Bibliography (note)

• Includes bibliographical references and index.

Contents

1. Introduction -- 2. Phenomenological description of the charged particle transport -- 3. Macroscopic plasma characteristics -- 4. Elemental processes in gas phase and on surfaces -- 5. The Boltzmann equation and transport equations of charged particles -- 6. General properties of charged particle transport in gases -- 7. Modeling of nonequilibrium (low-temperature) plasmas -- 8. Numerical procedure of modeling -- 9. Capacitively coupled plasma -- 10. Inductively coupled plasma -- 11. Magnetically enhanced plasma -- 12. Plasma processing and related topics.

ISBN

0750309768

LCCN

2005056888

OCLC

• OCM62290646
• SCSB-5245002

Owning Institutions

Columbia University Libraries