Research Catalog
Plasma techniques for film deposition
- Title
- Plasma techniques for film deposition / Mitsuharu Konuma.
- Author
- Konuma, Mitsuharu, 1950-
- Publication
- Harrow, U.K. : Alpha Science International, [2005], ©2005.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TK7871.15.F5 K58 2005g | Off-site |
Holdings
Details
- Additional Authors
- Konuma, Mitsuharu, 1950-
- Description
- ix, 337 pages : illustrations; 25 cm
- Subjects
- Note
- "[Originally published in 1992 as] Film deposition by plasma techniques, Springer-Verlag ... Some of the contents, especially the first half ... is based upon the old book ... however, many parts of the text and figures have been completely updated and revised"--Pref.
- Bibliography (note)
- Includes bibliographical references (p. 273-323) and index.
- ISBN
- 184265151X
- OCLC
- ocm61459616
- SCSB-5247382
- Owning Institutions
- Columbia University Libraries