Research Catalog

Silicon processing for the VLSI era

Title
Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.
Author
Wolf, Stanley, 1943-
Publication
Sunset Beach, Calif. : Lattice Press, ©1986-

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v.1TextRequest in advance TK7874 .W635 1986 v.1Off-site

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Details

Additional Authors
Tauber, Richard N.
Description
volumes : illustrations; 25 cm
Subject
  • Integrated circuits > Very large scale integration
  • Silicon
Bibliography (note)
  • Includes bibliographies and index.
Contents
v. 1. Process technology.
ISBN
  • 0961672137 (cover : v. 1)
  • 0096167237 (canceled/invalid)
LCCN
86081923
OCLC
  • 14258223
  • ocm14258223
Owning Institutions
Columbia University Libraries