Research Catalog

Electron-beam, X-ray, and ion-beam lithographies VI : 5-6 March 1987, Santa Clara, California

Title
Electron-beam, X-ray, and ion-beam lithographies VI : 5-6 March 1987, Santa Clara, California / Phillip D. Blais, chair/editor.
Publication
Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 1987.

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Details

Additional Authors
Blais, Phillip D.
Description
vi, 265 pages : illustrations; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 773
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 773.
Subject
  • Lithography, Electron beam > Congresses
  • X-ray lithography > Congresses
  • Ion beam lithography > Congresses
  • Microlithography > Congresses
Bibliography (note)
  • Includes bibliographies and index.
ISBN
0892528087
LCCN
87060741
OCLC
  • 506773759
  • ocn506773759
Owning Institutions
Columbia University Libraries