Research Catalog

Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.

Title
Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A. / editors, J.W. Coburn, R.A. Gottscho, D.W. Hess.
Publication
Pittsburgh, Pa. : Materials Research Society, [1986], ©1986.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
How do I pick up this item and when will it be ready?
TextRequest in advance TA2005 .P534 1986Off-site

Holdings

Details

Additional Authors
  • Coburn, J. W., 1932-
  • Gottscho, R. A.
  • Hess, Dennis W.
  • Materials Research Society.
Description
xvii, 463 pages : illustrations; 24 cm.
Series Statement
Materials Research Society symposia proceedings, 0272-9172 ; v. 68
Uniform Title
Materials Research Society symposia proceedings ; v. 68.
Subject
Plasma engineering > Congresses
Bibliography (note)
  • Includes bibliographies and indexes.
ISBN
0931837340 :
LCCN
86016292
OCLC
  • 13795753
  • ocm13795753
Owning Institutions
Columbia University Libraries