Research Catalog

Advances in resist technology and processing IV : 2-3 March 1987, Santa Clara, California

Title
Advances in resist technology and processing IV : 2-3 March 1987, Santa Clara, California / Murrae J. Bowden, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1987], ©1987.

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Details

Additional Authors
  • Bowden, M. J., 1943-
  • Society of Photo-optical Instrumentation Engineers.
Description
vi, 367 pages : illustrations; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 771
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 771.
Subject
Photoresists > Congresses
Bibliography (note)
  • Includes bibliographies and index.
ISBN
0892528060
LCCN
87060739
OCLC
  • 18380883
  • ocm18380883
Owning Institutions
Columbia University Libraries