Research Catalog
Advances in resist technology and processing IV : 2-3 March 1987, Santa Clara, California
- Title
- Advances in resist technology and processing IV : 2-3 March 1987, Santa Clara, California / Murrae J. Bowden, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
- Publication
- Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1987], ©1987.
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Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Text | Request in advance | TK8331 .A38 1987g | Off-site |
Holdings
Details
- Additional Authors
- Description
- vi, 367 pages : illustrations; 28 cm.
- Series Statement
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 771
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 771.
- Subject
- Photoresists > Congresses
- Bibliography (note)
- Includes bibliographies and index.
- ISBN
- 0892528060
- LCCN
- 87060739
- OCLC
- 18380883
- ocm18380883
- Owning Institutions
- Columbia University Libraries