Research Catalog

Dielectric films for advanced microelectronics

Title
Dielectric films for advanced microelectronics / edited by Mikhail Baklanov, Martin Green, and Karen Maex.
Publication
Chichester, England ; Hoboken, NJ : John Wiley & Sons, [2007], ©2007.

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TextRequest in advance TK7871.15.F5 D54 2007Off-site
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Holdings

Details

Additional Authors
  • Baklanov, Mikhail.
  • Green, Martin.
  • Maex, Karen.
Description
xxii, 486 pages : illustrations; 26 cm.
Series Statement
Wiley series in materials for electronic and optoelectronic applications
Uniform Title
Wiley series in materials for electronic and optoelectronic applications.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
  • 9780470013601 (cloth : alk. paper)
  • 0470013605 (hbk.)
LCCN
2006030740
OCLC
  • ocm71581699
  • 71581699
  • SCSB-5327726
Owning Institutions
Columbia University Libraries