Research Catalog

Semiconductor lithography : principles, practices, and materials

Title
Semiconductor lithography : principles, practices, and materials / Wayne M. Moreau.
Author
Moreau, Wayne M.
Publication
New York : Plenum Press, [1988], ©1988.

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TextRequest in advance TK7871.85 .M583 1988Off-site

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Details

Description
xx, 931 pages : illustrations; 26 cm.
Series Statement
Microdevices : physics and fabrication technologies
Uniform Title
Microdevices.
Subject
  • Semiconductors
  • Microlithography
  • Photoresists
Bibliography (note)
  • Includes bibliographies and index.
ISBN
0306421852
LCCN
87029077
OCLC
  • 16871199
  • ocm16871199
Owning Institutions
Columbia University Libraries