Research Catalog
Semiconductor lithography : principles, practices, and materials
- Title
- Semiconductor lithography : principles, practices, and materials / Wayne M. Moreau.
- Author
- Moreau, Wayne M.
- Publication
- New York : Plenum Press, [1988], ©1988.
Items in the Library & Off-site
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1 Item
Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Text | Request in advance | TK7871.85 .M583 1988 | Off-site |
Holdings
Details
- Description
- xx, 931 pages : illustrations; 26 cm.
- Series Statement
- Microdevices : physics and fabrication technologies
- Uniform Title
- Microdevices.
- Subject
- Bibliography (note)
- Includes bibliographies and index.
- ISBN
- 0306421852
- LCCN
- 87029077
- OCLC
- 16871199
- ocm16871199
- Owning Institutions
- Columbia University Libraries