Research Catalog

Title

Amorphous and polycrystalline thin-film silicon science and technology--2007 : Symposium held April 9-13, 2007, San Francisco, California, U.S.A. / editors: Virginia Chu [and others].

Publication

Warrendale, Penn. : Materials Research Society, [2007], ©2007.

Items in the Library & Off-site

Holdings

Details

Additional Authors

• Chu, Virginia.
• Materials Research Society. Fall Meeting (2007 : San Francisco, Calif.)
• Symposium on Amorphous and Polycrystalline Thin-Film Silicon Science and Technology (2007 : San Francisco, Calif.)

Description

xx, 594 pages : illustrations; 24 cm.

Series Statement

Materials Research Society symposium proceedings ; v. 989

Uniform Title

Materials Research Society symposia proceedings ; v. 989.

Subjects

• Thin film devices > Congresses
• Amorphous semiconductors > Congresses
• Semiconductor films > Congresses
• Solar cells > Congresses
• Crystal growth > Congresses
• Inhomogeneous materials > Congresses
• Chemical vapor deposition > Congresses
• Silicon crystals > Congresses

Note

• " ... Symposium A, 'Amorphous and Polycrystalline Thin-Film Silicon Science and Technology--2007,' was held April 9-13 at the 2007 MRS Spring Meeting in San Francisco, California...."--P. xix.

Bibliography (note)

• Includes bibliographical references and indexes.

Contents

• Defects and Metastability -- Spin Density in Thin-Film Silicon Before and After Electron Bombardment / Oleksandr Astakhov, Reinhard Carius, Yuri Petrusenko, Valeriy Borysenko, Dmitry Barankov and Friedhelm Finger -- Metastable Defects in Tritiated Amorphous Silicon / Tong Ju, Janica Whitaker, Stefan Zukotynski, Nazir Kherani, P. Craig Taylor and Paul Stradins -- Light Soaking and Thermal Annealing Effects on the Micro-Electrical Properties of Amorphous and Nanocrystalline Mixed-Phase Silicon Solar Cells / C.-S. Jiang, B. Yan, H. R. Moutinho, M. M. Al-Jassim, J. Yang and S. Guha -- Solar Cells I -- Electrical and Optical Modeling of Thin-Film Silicon Solar Cells / Miro Zeman and Janez Krc -- Enhancing Light-Trapping and Efficiency of Solar Cells with Photonic Crystals / Rana Biswas and Dayu Zhou -- High Open-Circuit Voltage In Silicon Heterojunction Solar Cells / Qi Wang, Matt R. Page, Eugene Iwancizko, Yueqin Xu, Lorenzo Roybal, Russell Bauer, Dean Levi, Yanfa Yan, Tihu Wang and Howard M. Branz -- Alloys -- Effects of Nitrogen Addition on the Properties of a-SiCN:H Films Using Hexamethyldisilazane / Amornrat Limmanee, Michio Otsubo, Tsutomu Sugiura, Takehiko Sato, Shinsuke Miyajima, Akira Yamada and Makoto Konagai -- Dependence of the Electronic Properties of Hot-Wire CVD Amorphous Silicon-Germanium Alloys on Oxygen Impurity Levels / Shouvik Datta, J. David Cohen, Yueqin Xu, A. H. Mahan and Howard M. Branz -- High Quality a-Ge:H Films and Devices Through Enhanced Plasma Chemistry / Erik V. Johnson and Pere Roca i Cabarrocas -- Dielectric Properties of Ultra Dense (3 g/cm[superscript 3]) Silicon Nitride Deposited by Hot Wire CVD at Industrially Relevant High Deposition Rates / Zomer Silvester Houweling, Vasco Verlaan, Karine van der Werf, Hanno D. Goldbach and Ruud E. I. Schropp -- Poster Session: Alloys -- Crystalline Silicon Surface Passivation by PECV-Deposited Hydrogenated Amorphous Silicon Oxide Films [a-SiO[subscript x]:H] / Thomas Mueller, Wolfgang Duengen, Reinhart Job, Maximilian Scherff and Wolfgang Fahrner -- Effect of Boron Doping on Microcrystalline Germanium Carbon Thin Films / Yasutoshi Yashiki, Seiichi Kouketsu, Shinsuke Miyajima, Akira Yamada and Makoto Konagai -- Characterization of Silicon Carbide Thin Films Obtained via Sublimation of a Solid Polymer Source Using Polymer-Source CVD Process / El Hassane Oulachgar, Cetin Aktik, Starr Dostie, Subhash Gujrathi and Mihai Scarlete -- Low Temperature High Quality Growth of Silicon-Dioxide Using Oxygenation of Hydrogenation-Assisted Nano-Structured Silicon Thin Films / Nima Rouhi, Behzad Esfandyarpour, Shams Mohajerzadeh, Pouya Hashemi, Bahman Hekmat-Shoar and Michael D. Robertson -- Channel Reliability in MOSFETs with Gate Oxide Grown Using ECR Plasma of O[subscript 2]/He / Vishwas Jaju and Vikram Dalal -- Poster Session: Crystallization -- A Novel Bonding Technique Using Metal-Induced Crystallization of Amorphous Silicon / Markus D. Ong and Reinhold H. Dauskardt -- Effects of Power Density and Thickness on Aluminum-Induced Crystallization of PECVD Amorphous Silicon / Kendrick S. Hsu, Jeremy Ou-Yang, Li P. Ren and Grant Z. Pan -- Comparative Study of Hot-Wire Chemical Vapor Deposition Onto (100) Si Near 600[degrees]C: Epitaxial and Polycrystalline Silicon Films / Charles W. Teplin, Howard M. Branz, Kim M. Jones, Bobby To, Eugene Iwaniczko and Paul Stradins -- ESR Study of Crystallization of Hydrogenated Amorphous Silicon Thin Films / Tining Su, Tong Ju, P. Craig Taylor, Paul Stradins, Yueqin Xu, Falah Hasoon, Qi Wang and Walter A. Harrison -- Hot-Wire Chemical Vapor Deposition Epitaxy on Polycrystalline Silicon Seeds on Glass / Charles W. Teplin, Howard M. Branz, Kim M. Jones, Manuel J. Romero, Paul Stradins and Stefan Gall -- Grain Size Control by Means of Solid Phase Crystallization of Amorphous Silicon / Jordi Farjas, Pere Roura and Pere Roca i Cabarrocas -- Microwave Activation of Dopants and Solid Phase Epitaxy in Silicon / D. C. Thompson, J. Decker, T. L. Alford, J. W. Mayer and N. David Theodore -- Low Temperature Epitaxy of n-Doped Silicon Thin Films Using Plasma Enhanced Chemical Vapor Deposition / Mahdi Farrokh Baroughi, Hassan G. El-Gohary, Cherry Y. Cheng and Siva Sivoththaman -- Poster Session: Micro-and Nanocrystalline Silicon -- Relation Between Electronic Properties and Density of Crystalline Agglomerates in Microcrystalline Silicon / Paula C. P. Bronsveld, Arjan Verkerk, Tomas Mates, Antonin Fejfar, Jatindra K. Rath and Ruud E. I. Schropp -- Optimization of Microcrystalline Silicon Deposited by Expanding Thermal Plasma Chemical Vapor Deposition for Solar-Cell Application / R. Jimenez Zambrano, R. A. C. M. M. van Swaaij and M. C. M. van de Sanden -- Boron Doping Effects In Microcrystalline Silicon / Wolfhard Beyer, Lars Niessen and Frank Pennartz -- Poster Session: Thin Film Growth -- Phase Control and Stability of Thin Silicon Films Deposited From Silane Diluted with Hydrogen / Gijs van Elzakker, Pavol Sutta, Frans D. Tichelaar and Miro Zeman -- Reliability of Silicon Nitride Gate Dielectric in Vertical Thin-Film Transistors / M. Moradi, D. Striakhilev, I. Chan, A. Nathan, N. I. Cho and H. G. Nam -- Deposition Uniformity Control in a Commercial Scale HTO-CVD Reactor / Shigeru Sakai, Masaaki Ogino, Ryosuke Shimizu and Yukihiro Shimogaki -- Electronics on Flexible Substrates -- Flexible a-Si:H-Based Image Sensors Fabricated by Digital Lithography / William S. Wong, TseNga Ng, Michael L. Chabinyc, Rene A. Lujan, Raj B. Apte, Sanjiv Sambandan, Scott Limb and Robert A. Street -- Stability of Amorphous Silicon Thin-Film Transistors Under Prolonged High Compressive Strain / Jian-Zhang Chen, I-Chun Cheng, Sigurd Wagner, Warren Jackson, Craig Perlov and Carl Taussig -- Single Grain Si TFTs Fabricated at 100[degrees]C for Microelectronics on a Plastic Substrate / Ming He, R. Ishihara, T. Chen, J. W. Metselaar and C. I. M. Beenakker -- Novel Applications -- Performance of Thin-Film Silicon MEMS on Flexible Plastic Substrates / Samadhan Patil, Virginia Chu and Joao Pedro Conde -- Amorphous Silicon Based TFT and MIS Nonvolatile Memories / Yue Kuo and Helinda Nominanda -- Monolithic Integrated a-Si:H Based pin-Diodes with Orthogonal Liquid Light Guidance Structures for Lab-on-Microchip Applications / Heiko Schafer, Konstantin Seibel, Lars Scholer and Markus Bohm -- [mu]-Watt Enhanced Electroluminescent Power of Silicon Nanocrystal Light-Emitting Diodes Made on Nano-Scale Silicon-Tip-Array Substrate / Gong-Ru Lin and Chun-Jung Lin -- Thin Film Transistors I -- High Mobility Nanocrystalline Silicon TFTs for Display Application / Min-Koo Han and Sang-Myeon Han -- Self-Aligned Nanocrystalline Silicon Thin-Film Transistor with Deposited n[superscript +] Source/Drain Layer / I.-Chun Cheng and Sigurd Wagner -- Contact Effects in High Mobility Microcrystalline Silicon Thin-Film Transistors / Kah Yoong Chan, Eerke Bunte, Helmut Stiebig and Dietmar Knipp -- Images and Sensors -- PECVD Grown p-i-n Si and Si,Ge Thin-Film Photodetectors for Integrated Oxygen Sensors / Debju Ghosh, Ruth Shinar, Vikram L. Dalai, Zhaoqun Zhou and Joseph Shinar -- Segmented Amorphous Silicon n-i-p Photodiodes on Stainless-Steel Foils for Flexible Imaging Arrays / Y. Vygranenko, R. Kerr, K. H. Kim, J. H. Chang, D. Striakhilev, A. Nathan, G. Heiler and T. Tredwell -- Transient Current Behavior of Vertically Integrated Amorphous Silicon Diodes / Gregory Choong, Nicolas Wyrsch, Christophe Ballif, Rolf Kaufmann and Felix Lustenberger -- Optical Readout in pinpi'n and pini'p Imagers: A Comparison / P. Louro, M. Vieira, Y. Vygranenko, M. Fernandes and A. Garcao -- Germanium-Silicon Separate Absorption and Multiplication Avalanche Photodetectors Fabricated with Low Temperature High Density Plasma Chemical Vapor Deposited Germanium / Malcolm Carroll, Kent Childs, Darwin Serkland, Robert Jarecki, Todd Bauer and Kevin Saiz --
• Modeling and Characterization of the Hydrogenated Amorphous Silicon Metal Insulator Semiconductor Photosensors for Digital Radiography / N. Safavian, Y. Vygranenko, J. Chang, Kyung Ho Kim, J. Lai, D. Striakhilev, A. Nathan, G. Heiler, T. Tredwell and M. Fernandes -- Crystallization Techniques I -- An Approach to Obtain Single Layer of Nanostructured Si by Laser Irradiation on Ultrathin Amorphous Si Films / Jun Xu, Zanhong Cen, Jiang Zhou, Wei Li, Xinfan Huang and Kunji Chen -- Rapid Crystallization of Amorphous Silicon Utilizing the Plasma Annealing at Atmospheric Pressure / Hajime Shirai, Yusuke Sakurai, Mina Ye, Koji Haruta, Tomohiro Kobayashi and Yu-ichiro Takemura -- Thin Film Transistors II -- Drain Bias Dependent Threshold Voltage Shift of a-Si:H TFT Due to the Pulsed Stress / Sang-Geun Park, Jae-Hoon Lee, Sang-Myeon Han, Sun-Jae Kim and Min-Koo Han -- Noise Performance of High Fill Factor Pixel Architectures for Robust Large-Area Image Sensors Using Amorphous Silicon Technology / Jackson Lai, Yuri Vygranenko, Gregory Heiler, Nader Safavian, Denis Striakhilev, Arokia Nathan and Timothy Tredwell -- Solar Cells II -- Status of nc-Si:H Solar Cells at United Solar and Roadmap for Manufacturing a-Si:H and nc-Si:H Based Solar Panels / Baojie Yan, Guozhen Yue and Subhendu Guha -- Advanced Deposition Phase Diagrams for Guiding Si:H-Based Multijunction Solar Cells / Jason A. Stoke, Nikolas J. Podraza, Jian Li, Xinmin Cao, Xunming Deng and Robert W. Collins -- Triple Junction n-i-p Solar Cells with Hot-Wire Deposited Protocrystalline and Microcrystalline Silicon / Ruud E. I. Schropp, Hongbo Li, Ronald H. J. Franken, Jatindra K. Rath, Karine van der Werf, Jan Willem Schuttauf and Robert L. Stolk -- High Rate Deposition of Amorphous Silicon Based Solar Cells Using Modified Very High Frequency Glow Discharge / Guozhen Yue, Baojie Yan, Jeffrey Yang and Subhendu Guha -- Fabrication and Optimization of a-Si:H n-i-p Single-Junction Solar Cells with 8 A/s Intrinsic Layers of Protocrystalline Si:H Materials / Xinmin Cao, Wenhui Du, Y. Ishikawa, Xianbo Liao, Robert W. Collins and Xunming Deng -- Crystallization Techniques II -- Laser Crystallization of Silicon for Large Area Electronics / Toshiyuki Sameshima -- Defect Characterization of Poly crystalline Silicon Layers Obtained by Aluminum-Induced Crystallization and Epitaxy / Dries Van Gestel, Ivan Gordon, Lodewijk Carnel, Guy Beaucarne and Jef Poortmans -- Comparative Study of Solid-Phase Crystallization of Amorphous Silicon Deposited by Hot-Wire CVD, Plasma-Enhanced CVD, and Electron-Beam Evaporation / Paul Stradins, Oliver Kunz, David L. Young, Yanfa Yan, Kim M. Jones, Yueqin Xu, Robert C. Reedy, Howard M. Branz, Armin G. Aberle and Qi Wang -- Poster Session: Thin Film Transistors -- Manufacturing of TFTs with High Deposition Rated Microcrystalline Silicon Using Plasma Enhanced Chemical Vapor Deposition / Kyung-Bae Park, Ji-Sim Jung, Jong-Man Kim, Myung-kwan Ryu, Sang-Yoon Lee and Jang-Yeon Kwon -- Effect of a Channel Length and Drain Bias on the Threshold Voltage of Field Enhanced Solid Phase Crystallization Polycrystalline Thin-Film Transistor on the Glass Substrate / Won-Kyu Lee, Sang-Myeon Han, Sang-Geun Park, Young-Jin Chang, Kee-Chan Park, Chi-Woo Kim and Min-Koo Han -- Poster Session: Solar Cells -- Influence of Amorphous Layers on Performance of Nanocrystalline/Amorphous Superlattice Si Solar cells / Atul Madhavan, Debju Ghosh, Max Noack and Vikram Dalai -- Improved Efficiency of Single Junction Microcrystalline Silicon n-i-p Solar Cells with an i-Layer Made by Hotwire CVD / Hongbo Li, Ronald H. J. Franken, Robert L. Stolk, C. H. M. van der Werf, Jan-Willem A. Schuttauf, Jatin K. Rath and Ruud E. I. Schropp -- Resistive Losses at c-Si/a-Si:H/ZnO Contacts for Heterojunction Solar Cells / Florian Einsele, Phillip Johannes Rostan and Uwe Rau -- Hydrofluoric Acid Treatment of Amorphous Silicon films for Photovoltaic Processing / M. Burrows, U. Das, M. Lu, S. Bowden, R. Opila and R. Birkmire -- High-Performance, Tandem-Type Amorphous Silicon Solar Cell / Porponth Sichanugrist, Nirut Pingate and Channarong Piromjit -- Hydrogen Passivation of Thin-Film Polysilicon Solar Cells / Lode Camel, Ivan Gordon, Dries Van Gestel, Guy Beaucarne and Jef Poortmans -- Photocurrent Profile in a-SiC:H Monolithic Tandem pinpin and pinip Photodiodes / Alessandro Fantoni, Manuela Vieira and Yuri Vygranenko -- Poster Session: Imagers, Sensors and Novel Applications -- Study of a Fabrication Process and Characterization of One Dimensional Array of Un-Cooled Micro-Bolometers Based on Germanium Films Deposited by Plasma / Mario Moreno, Andrey Kosarev, Alfonso Torres and Roberto Ambrosio -- Preliminary Results on Large Area X-ray a-SiC:H Multilayer Detectors with Optically Addressed Readout / Manuela Vieira, Yuri Vygranenko, Miguel Fernandes, Paula Louro, Pedro Sanguino, Alessandro Fantoni and Reinhard Schwarz -- Modeling the Laser Scanned Photodiode S-Shaped J-V Characteristic / Miguel Fernandes, Manuela Vieira and Rodrigo Martins -- Temperature Dependence of Leakage Current in Segmented a-Si:H n-i-p Photodiodes / Jeff Hsin Chang, Tsu Chiang Chuang, Yuri Vygranenko, Denis Striakhilev, Kyung Ho Kim, Arokia Nathan, Gregory Heiler and Timothy Tredwell -- High Performance Hydrogenated Amorphous Silicon -p Photo-Diodes on Glass and Plastic Substrates by w-Temperature Fabrication Process / Kyung Ho Kim, Yuri Vygranenko, Mark Bedzyk, Jeff Hsin Chang, Tsu Chiang Chuang, Denis Striakhilev, Arokia Nathan, Gregory Heiler and Timothy Tredwell -- Poster Session: Electronics and Flexible Substrates -- T-Wire Deposited Nanocrystalline Silicon TFTs on Substrates / Farhad Taghibakhsh, Michael M. Adachi and Karim S. Karim -- Poster Session: Electronic Properties and Metastability -- õwth and Electronic Properties in Hot Wire Deposited Nanocrystalline SI Solar Cells / Kamal Muthukrishnan, Vikram Dalai and Max Noack -- Solution of Structural and Electronic Properties in Iron-Doped Nanocrystalline Silicon Thin Films / Hyun Jung Lee, Andrei Sazonov and Arokia Nathan -- Poster Session: Structural Properties -- Stochastic Properties of Several Silicon Nitride Films / Xiao Liu, Thomas H. Metcalf, Qi Wang and Douglas M. Photiadis -- Structural Analysis of Nanocrystalline Silicon Separed by Hot-Wire Chemical Vapor Deposition Polymer Substrates / Michael M. Adachi, Farhad Taghibakhsh, Karen L. Kavanagh and Karim S. Karim -- Manipulating the Hydrogen-Bonding Configuration in ETP-CVD a-Si:H / M. A. Wank, R. A. C. M. M. van Swaaij and M. C. M. van de Sanden -- Poster Session: Nanocrystals, Nanoclusters and Nanowires -- Tailored Deposition by LPCVD of Non-Stoichiometric Si Oxides and Their Application in the Formation of Si Nanocrystals Embedded in SiO[subscript 2] by Thermal Annealing / Bruno Morana, Juan Carlos G. de Sande, Andres Rodriguez, Jesus Sangrador, Tomas Rodriguez, Manuel Avella, Angel Carmelo Prieto and Juan Jimenez -- Silicon Nanowires: Growth Studies Using Pulsed PECVD / David Parlevliet and John C. L. Cornish -- Solar Cells III -- Recent Progress in Up-Scaling of Amorphous and Micromorph Thin-Film Silicon Solar Cells to 1.4 m[superscript 2] Modules / Johannes Meier, Ulrich Kroll, Stefano Benagli, Tobias Roschek, Andreas Huegli, Joel Spitznagel, Oliver Kluth, Daniel Borello, Michael Mohr, Dmitri Zimin, Giovanni Monteduro, Jiri Springer, Christoph Ellert, Girogios Androutsopoulos, Gerold Buechel, Arno Zindel, Franz Baumgartner and Detlev Koch-Ospelt -- Temperature Dependence of Silicon-Based Thin-Film Solar Cells on Their Intrinsic Absorber / Kobsak Sriprapha, Ihsanul Afdi Yunaz, Shuichi Hiza, Kun Ho Ahn, Seung Yeop Myong, Akira Yamada and Makoto Konagai -- Thin-Film Polycrystalline-Silicon Solar Cells on Aluminum-Induced Crystallization / Ivan Gordon, Lode Camel, Dries Van Gestel, Guy Beaucarne and Jef Poortmans -- Materials Optimization for Silicon Heterojunction Solar Using Spectroscopic Ellipsometry / Dean Levi, Eugene Iwanizcko, Steve Johnston, Qi Wang and Howard M. Branz --
• Contact Silicon Heterojunction (IBC-SHJ) Cell / Meijun Lu, Stuart Bowden, Ujjwal Das, Michael Burrows and Robert Birkmire -- Film Growth -- ẽ-Resolved Cavity Ringdown Spectroscopy as a Monitoring ĩnique of Nanoparticles in Pulsed VHF Plasmas / Takehiko Nagai, Arno H. M. Smets and Michio Kondo.

ISBN

• 9781558999497
• 1558999493

OCLC

• ocn179474563
• 179474563
• SCSB-5372880

Owning Institutions

Columbia University Libraries