Research Catalog

Proceedings of the Fifth Symposium on Plasma Processing

Title
Proceedings of the Fifth Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky.
Author
Symposium on Plasma Processing (5th : 1984 : New Orleans, La.)
Publication
Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Dielectrics and Insulation and Electronics Divisions, Electrochemical Society, [1985], ©1985.

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Details

Additional Authors
  • Mathad, G. S.
  • Schwartz, G. C.
  • Smolinsky, G.
Description
x, 619 pages : illustrations; 23 cm.
Series Statement
Proceedings (Electrochemical Society) ; v. 85-1
Uniform Title
Proceedings (Electrochemical Society) ; v. 85-1.
Subjects
Bibliography (note)
  • Includes bibliographies and indexes.
LCCN
85070593
OCLC
  • 11991009
  • ocm11991009
Owning Institutions
Columbia University Libraries