Research Catalog

Proceedings of the Sixth Symposium on Plasma Processing

Title
Proceedings of the Sixth Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, R.A. Gottscho.
Author
Symposium on Plasma Processing (6th : 1986 : San Diego, Calif.)
Publication
Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, [1987], ©1987.

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StatusFormatAccessCall NumberItem Location
TextRequest in advance TA2005 .S95 1986Off-site

Holdings

Details

Additional Authors
  • Mathad, G. S.
  • Schwartz, G. C.
  • Gottscho, R. A.
Description
x, 754 pages : illustrations; 23 cm.
Series Statement
Proceedings / The Electrochemical Society, Inc. ; v. 87-6
Uniform Title
Proceedings (Electrochemical Society) ; v. 87-6.
Alternative Title
Plasma processing.
Subject
Note
  • Spine title: Plasma processing.
Bibliography (note)
  • Includes bibliographies and indexes.
LCCN
87080742
OCLC
  • 15989294
  • ocm15989294
Owning Institutions
Columbia University Libraries