Research Catalog

Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

Title
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films / edited by Vikram J. Kapoor, Kevin T. Hankins ; [sponsored by] Dielectrics and Insulation and Electronics Divisions.
Author
Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (2nd : 1986 : San Diego, Calif.)
Publication
Pennington, NJ (10 S. Main St., Pennington 08534-2696) : Electrochemical Society, [1987], ©1987.

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Details

Additional Authors
  • Kapoor, Vikram J.
  • Hankins, Kevin T.
  • Electrochemical Society. Dielectrics and Insulation Division.
  • Electrochemical Society. Electronics Division.
Description
x, 550 pages : illustrations; 23 cm.
Series Statement
Proceedings (Electrochemical Society) ; v. 87-10
Uniform Title
Proceedings (Electrochemical Society) ; v. 87-10.
Subjects
Note
  • Papers presented at the symposium held October 20-24, 1986 in San Diego, Calif.
Bibliography (note)
  • Includes bibliographies and indexes.
LCCN
87082368
OCLC
  • 16953068
  • ocm16953068
Owning Institutions
Columbia University Libraries