Research Catalog

Title

Microelectromechanical systems, materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, USA / editors, David A. LaVan [and others].

Publication

Warrendale, Pa. : Materials Research Society, [2008], ©2008.

Items in the Library & Off-site

Holdings

Details

Additional Authors

• LaVan, David A.
• Materials Research Society. Fall Meeting (2007 : Boston, Mass.)
• Symposium on Microelectromechanical Systems-- Materials and Devices (2007 : Boston, Mass.)

Description

[xiv], 325 pages : illustrations; 24 cm.

Series Statement

Materials Research Society symposium proceedings ; v. 1052

Uniform Title

Materials Research Society symposia proceedings ; v. 1052.

Subjects

• Microelectromechanical systems > Congresses
• Microelectromechanical systems > Materials > Congresses

Note

• "This proceedings reports on research presented at Symposium DD, 'Microelectromechanical systems-- Materials and Devices' held November 26-28 at the 2007 MRS Fall Meeting in Boston, Massachusetts."--P. xi.
• Previous conference proceedings entitled: Materials science of microelectromechanical systems (MEMS) devices symposium.

Bibliography (note)

• Includes bibliographical references and indexes.

Contents

A Review of Tension Test Methods for Thin Films / William N. Sharpe, Jr. -- Reliability of MEMS Materials: Mechanical Characterization of Thin Films Using the Wafer Scale Bulge Test and Improved Microtensile Techniques / Joao Gaspar, Marek Schmidt, Jochen Held and Oliver Paul -- Fast Characterization of Silicon Membrane Structures by Laser-Doppler Vibrometry / Ronny Gerbach, Matthias Ebert and Joerg Bagdahn -- MEMS Lubrication: An Atomistic Perspective of a Bound + Mobile Lubricant / Douglas L. Irving and Donald W. Brenner -- Microstructural and Geometrical Factors Influencing the Mechanical Failure of Polysilicon for MEMS / Krishna Jonnalagadda and Ioannis Chasiotis -- Passive Devices for Determining Fracture Strength of MEMS Structural Materials / H. Kahn, R. Ballarini and A. H. Heuer -- Effect of Surface Oxide Layer on Mechanical Properties of Single Crystalline Silicon / Kenji Miyamoto, Koji Sugano, Toshiyuki Tsuchiya and Osamu Tabata -- Indentation Characterization of Fracture Toughness and Interfacial Strength of PECVD Nitrides After Rapid Thermal Annealing / H-Y. Yan, K-S. Ou and K-S. Chen -- A Novel Micro Tensile Testing Instrument with Replaceable Testing Specimen by Parylene Passivation Technique / Yung-Dong Lau, Tso-Chi Chang, Hong Hocheng, Rongshun Chen and Weileun Fang -- Mechanical Stress Sensors for Copper Damascene Interconnects / Romain Delamare, Sylvain Blayac, Moustafa Kasbari, Karim Inal and Christian Rivero -- Elastic and Viscoelastic Characterization of Polydimethylsiloxane (PDMS) for Cell-Mechanics Applications / I-Kuan Lin, Yen-Ming Liao, Yan Liu, Kuo-Shen Chen and Xin Zhang -- A Direct Method of Determining Complex Depth Profiles of Residual Stresses in Thin Films on a Nanoscale - Mechanics of Residually Stressed Systems / Stefan Massl, Jozef Keckes and Reinhard Pippan -- Modification of Conductivity and of Mechanical Properties of Electroactive Polymer (EAP) Thin Films by Titanium Ion Implantation / Muhamed Niklaus, Samuel Rosset, Massoud Dadras, Philippe Dubois and Herbert R. Shea -- C-Axis Oriented ZnO Film by RF Sputtering and Its Integration with MEMS Processing / Sudhir Chandra and Ravindra Singh -- Optimization of the Geometry of the MEMS Electrothermal Actuator to Maximize In-Plane Tip Deflection / Edward S. Kolesar, Thiri Htun, Brandon Least, Jeffrey Tippey and John Michalik -- Aligned Low-Temperature Wafer Bonding for MEMS Manufacturing: Challenges and Promises / Viorel Dragoi, Thorsten Matthias, Gerald Mittendorfer and Paul Lindner -- Compressive Stress Accumulation in Composite Nanoporous Gold and Silicone Bilayer Membranes: Underlying Mechanisms and Remedies / Erkin Seker, Ling Huang, Matthew R. Begley, Hilary Bart-Smith, Robert G. Kelly, Giovanni Zangari, Michael L. Reed and Marcel Utz -- Variation in Dislocation Pattern Observed in SCS Films Fractured by Tensile Test: Effects of Film Thickness and Testing Temperature / Shigeki Nakao, Taeko Ando, Shigeo Arai, Noriyuki Saito and Kazuo Sato -- Micro-Topography Enhances Directional Myogenic Differentiation of Skeletal Precursor Cells / Yi Zhao -- RF MEMS Behavior, Surface Roughness and Asperity Contact / O. Rezvanian, M. A. Zikry, C. Brown and J. Krim -- The Effect of Hydrophobic Patterning on Micromolding of Aqueous-Derived Silk Structures / Konstantinos Tsioris, Robert D. White, David L. Kaplan and Peter Y. Wong -- Fabrication and Characterization of Normal and Shear Stresses Sensitive Tactile Sensors by Using Inclined Micro-Cantilevers Covered with Elastomer / Masayuki Sohgawa, Yu-Ming Huang, Minoru Noda, Takeshi Kanashima, Kaoru Yamashita, Masanori Okuyama, Masaaki Ikeda and Haruo Noma -- Design and Fabrication of an Optical-MEMS Sensor / Vaibhav Mathur, Jin Li and William D. Goodhue -- Relative Resistance Chemical Sensors Built on Microhotplate Platforms / Joshua L. Hertz, Christopher B. Montgomery, David L. Lahr and Steve Semancik -- Novel Differential Surface Stress Sensor for Detection of Chemical and Biological Species / Kyungho Kang and Pranav Shrotriya -- Excimer Laser Induced Patterning of PSZT and PLZT Films / Patrick William Leech and Anthony S. Holland -- Optically Actuated Deformable Micro-Mirrors for Adaptive Optics / Troy Ribaudo, Jin Li, Bahareh Haji-saeed, Jed Khoury and William Goodhue -- High Temperature Annealing Studies on the Piezoelectric Properties of Thin Aluminum Nitride Films / R. Farrell, V. R. Pagan, A. Kabulski, Sridhar Kuchibhatla, J. Harman, K. R. Kasarla, L. E. Rodak, J. Peter Hensel, P. Famouri and D. Korakakis -- A Miniature Silicon Condenser Microphone Improved with a Flexure Hinge Diaphragm and a Large Back Volume / H. J. Kim, S. Q. Lee, J. W. Lee, S. K. Lee and K. H. Park -- Comparison of 1D and 2D Theories of Thermoelastic Damping in Flexural Microresonators / Sairam Prabhakar and Srikar Vengallatore -- Compliant MEMS Motion Characterization by Nanoindentation / Joseph Goerges Choueifati, Craig Lusk, Xialou Pang and Alex A. Volinsky -- Effects of Supercritical Carbon Dioxide on Adhesive Strength Between Micro-Sized Photoresist Patterns and Silicon Substrates / Chiemi Ishiyama, Akinobu Shibata, Masato Sone and Yakichi Higo -- Protection Layer Influence on Capacitive Micromachined Ultrasonic Transducers Performance / Edgard Jeanne, Cyril Meynier, Franck Teston, Dominique Certon, Nicolas Felix, Mathieu Roy and Daniel Alquier -- Fabrication of C54-TiSi[subscript 2] Thin Films Using Cathodic Are Deposition and Rapid Thermal Annealing / Hui Xia, William R. Knudsen and Paul L. Bergstrom -- New Experimental Approach for Measuring Electrical Contact Resistance with an Accurate Mechanical Actuation, Evaluation of the Performances of Gold Micro-Switches / Cedric Seguineau, Adrien Broue, Fabienne Pennec, Jeremie Dhennin, Jean-Michel Desmarres, Arnaud Pothier, Xavier Lafontan and Michel Ignat -- A Comparative Study of the Strength of Si, SiN and SiC Used at Nanoscales / Tuncay Alan and Pasqualina M. Sarro -- Compressive Magnetostriction of FeSm Alloy Film / Ryo Nakano, Yoshihito Matsumura and Yoshitake Nishi -- Influence of Materials on the Performance Limits of Microactuators / Prasanna Srinivasan and S. Mark Spearing -- Science and Technology of Piezoelectric/Diamond Hybrid Heterostructures for High Performance MEMS/NEMS Devices / Orlando Auciello, Anirudha Sumant, Jon Hiller, Bernd Kabius and Sudarsan Srinivasan -- Relationship Between Film Stress and Dislocation Microstructure Evolution in Thin Films / Ray S. Fertig and Shefford P. Baker -- Systematic Characterization of DRIE-Based Fabrication Process of Silicon Microneedles / Jochen Held, Joao Gaspar, Patrick Ruther, Matthias Hagner, Andreas Cismak, Andreas Heilmann and Oliver Paul -- Novel Fabrication Process for the Integration of MEMS Devices with Thick Amorphous Soft Magnetic Field Concentrators / Simon Brugger, Wilhelm Pfleging and Oliver Paul -- Analysis and Measurement of Forces in an Electrowetting-Driven Oscillator / Nathan Brad Crane, Alex A. Volinsky, Vivek Ramadoss, Michael Nellis, Pradeep Mishra and Xiaolu Pang -- Bottom-Up Fabrication of Individual SnO[subscript 2] Nanowires-Based Gas Sensors on Suspended Micromembranes / Albert Romano-Rodriguez, Francisco Hernandez-Ramirez, Joan Daniel Prades, Albert Tarancon, Olga Casals, Roman Jimenez-Diaz, Miguel Angel Juli, Juan Ramon Morante, Sven Barth, Sanjay Mathur, Andreas Helwig, Jan Spannhake and Gerhard Mueller -- Nature-Inspired Microfluidic Manipulation Using Magnetic Actuators / S. N. Khaderi, D. Ioan, J. M. J. den Toonder and P. R. Onck -- MEMS-Based MHz Silicon Ultrasonic Nozzles for Production of Monodisperse Drops / Y. L. Song, Chih H. Cheng, Ning Wang, Shirley C. Tsai, Yuan F. Chou, Ching T. Lee and Chen S. Tsai -- Enabling the Desktop NanoFab with DPN Pen and Ink Delivery Systems / Joseph S. Fragala, R. Roger Shile and Jason Haaheim.

ISBN

• 9781558999909
• 1558999906

OCLC

• ocn226035060
• 226035060
• SCSB-5399341

Owning Institutions

Columbia University Libraries