Research Catalog

Advances in resist technology and processing V : 29 February-2 March, 1988, Santa Clara, California

Title
Advances in resist technology and processing V : 29 February-2 March, 1988, Santa Clara, California / Scott A. MacDonald, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : International Society for Optical Engineering, 1988.

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Details

Additional Authors
  • MacDonald, Scott A.
  • Society of Photo-optical Instrumentation Engineers.
Description
viii, 449 pages : illustrations; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 920
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 920.
Subject
Photoresists > Congresses
Bibliography (note)
  • Includes bibliographies and index.
ISBN
0892529555 (pbk.)
LCCN
88060780
OCLC
  • 18524599
  • ocm18524599
Owning Institutions
Columbia University Libraries