Research Catalog
Advances in resist technology and processing V : 29 February-2 March, 1988, Santa Clara, California
- Title
- Advances in resist technology and processing V : 29 February-2 March, 1988, Santa Clara, California / Scott A. MacDonald, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
- Publication
- Bellingham, Wash., USA : International Society for Optical Engineering, 1988.
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Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Text | Request in advance | TR940 .A4794 1988 | Off-site |
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Details
- Additional Authors
- Description
- viii, 449 pages : illustrations; 28 cm.
- Series Statement
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 920
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 920.
- Subject
- Photoresists > Congresses
- Bibliography (note)
- Includes bibliographies and index.
- ISBN
- 0892529555 (pbk.)
- LCCN
- 88060780
- OCLC
- 18524599
- ocm18524599
- Owning Institutions
- Columbia University Libraries