Research Catalog

Advanced Processing of Semiconductor Devices II : 17-18 March 1988, Newport Beach, California

Title
Advanced Processing of Semiconductor Devices II : 17-18 March 1988, Newport Beach, California / Harold G. Craighead, J. Narayan, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organization, the Metallurgical Society.
Publication
Bellingham, Wash., USA : SPIE, [1988], ©1988.

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Details

Additional Authors
  • Craighead, Harold G.
  • Narayan, J. (Jagdish)
  • Society of Photo-optical Instrumentation Engineers.
  • Metallurgical Society (U.S.)
Description
viii, 164 pages : illustrations; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 945
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 945.
Subject
Bibliography (note)
  • Includes bibliographies and indexes.
ISBN
0892529806
LCCN
88060789
OCLC
  • 18658572
  • ocm18658572
Owning Institutions
Columbia University Libraries