Research Catalog

Ion implantation, sputtering and their applications

Title
Ion implantation, sputtering and their applications / by P. D. Townsend, J. C. Kelly, N. E. W. Hartley.
Author
Townsend, P. D. (Peter David)
Publication
London ; New York : Academic Press, 1976.

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Details

Additional Authors
  • Kelly, J. C. (John Clive)
  • Hartley, N. E. W.
Description
ix, 333 pages : illustrations; 24 cm
Subject
  • Ion implantation
  • Sputtering (Physics)
Bibliography (note)
  • Includes bibliographies and index.
ISBN
0126969507
LCCN
75196983
OCLC
  • 2400851
  • ocm02400851
Owning Institutions
Columbia University Libraries