Research Catalog
Proceedings of the Third Symposium on Automated Integrated Circuits Manufacturing
- Title
- Proceedings of the Third Symposium on Automated Integrated Circuits Manufacturing / edited by Joseph B. Anthony ; assistant editors, Mihir Parikh, Vaughn Akins, Robert Miller.
- Author
- Symposium on Automated Integrated Circuits Manufacturing (3rd : 1987 : Honolulu, Hawaii)
- Publication
- Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, [1988], ©1988.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TK7874 .S884 1987 | Off-site |
Holdings
Details
- Additional Authors
- Description
- viii, 484 pages : illustrations; 23 cm.
- Series Statement
- Proceedings (Electrochemical Society) ; v. 88-13
- Uniform Title
- Proceedings (Electrochemical Society) ; v. 88-13.
- Alternative Title
- Automated integrated circuits manufacturing.
- Subject
- Note
- Spine title: Automated integrated circuits manufacturing.
- Co-sponsored by the Electronics and Dielectrics and Insulation Divisions.
- Bibliography (note)
- Includes bibliographies and indexes.
- LCCN
- 88081197
- OCLC
- 19124347
- ocm19124347
- Owning Institutions
- Columbia University Libraries