Research Catalog

Title

Microelectromechanical systems--materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, USA / editors, Srikar Vengallatore [and others].

Publication

Warrendale, Pa. : Materials Research Society, [2009], ©2009.

Items in the Library & Off-site

Holdings

Details

Additional Authors

• Vengallatore, Srikar.
• Materials Research Society. Fall Meeting (2008 : Boston, Mass.)
• Symposium GG, "Microelectromechanical systems--Materials and Devices II" (2008 : Boston, Mass.)

Description

xi, 247 pages : illustrations; 24 cm.

Series Statement

MRS proceedings, 1946-4274 ; v. 1139

Uniform Title

Materials Research Society symposia proceedings ; v. 1139.

Subjects

• Thin films > Congresses
• Microelectromechanical systems > Materials > Congresses
• Nanostructured materials > Congresses
• Silicon > Congresses
• Microelectromechanical systems > Congresses

Note

• "Published proceedings articles from Symposium GG from the 2008 MRS Fall Meeting."

Bibliography (note)

• Includes bibliographical references and index.

Contents

Commercial MEMS Case Studies: The Impact of Materials, Processes and Designs / Jack Martin -- A Novel Gap Narrowing Process for Creating High Aspect Ratio Transduction Gaps for MEM HF Resonators / Steve Stoffels, George Bryce, Rita Van Hoof, Bert Du Bois, Robert Mertens, Robert Puers, Harrie A. Tilmans and Ann Witvrouw -- Dicing of Fragile MEMS Structures / Peter Lange, Norman Marenco, Sven Gruenzig, Stephan Warnat and Thilo Semperowitsch -- BioMEMS Technologies for Regenerative Medicine / Jeffrey T. Borenstein -- Design and Fabrication of MEMS Piezoelectric Rotational Actuators / Danny Gee, Wayne Churaman, Luke Currano and Eugene Zakar -- Measurement and Analysis of Structural Damping in Silicon Carbide Microresonators / Sairam Prabhakar, Frederic Nabki, Mourad El-Gamal and Srikar Vengallatore -- Fabrication and Hot Switching Behavior of Electroplated Gallium Spheres for MEMS / Yoonkap Kim and David Bahr -- Fast and Controlled Integration of Carbon Nanotubes Into Microstructures / Wenjun Xu, Chang-Hyeon Ji, Richard Shafer and Mark Allen -- Through Silicon Vias in Micro-Electromechanical Systems / Stephan Warnat, Ramona Ecke, Norman Marenco, Sven Gruenzig, Wolfgang Reinert and Peter Lange -- Effects of Aspect Ratio of Micro-Sized Photoresist Patterns on Bond Strength Between a Si Substrate with AFM Fracture Observation / Chiemi Ishiyama, Akinobu Shibata, Masato Sone and Yakichi Higo -- Resonance Fatigue Testing of Cantilever Specimens Prepared From Thin Films / Kwangsik Kwak, Masaaki Otsu and Kazuki Takashima -- Bending of Pd-Based Thin Film Metallic Glasses by Laser Forming Process / Yuki Ide, Masaaki Otsu, Junpei Sakurai, Seiichi Hata and Kazuki Takashima -- Droplet Formation at Microfluidic T-Junctions / Yu Xiang and David A. LaVan -- Controlling the Wrinkling of the Bilayer Thin Films Electrothermally / Shravan Chintapatla, John F. Muth and Leda M. Lunardi -- Thermal Bubble Nucleation in Nanochannels: Simulations and Strategies for Nanobubble Nucleation and Sensing / Manoj Sridhar, Dongyan Xu, Anthony B. Hmelo, Deyu Li and Leonard C. Feldman -- Rapid Cell Manipulation by Rotating Nanowires / Hansong Zeng, Joshua Ebel and Yi Zhao -- Novel Technique to Determine Elastic Constants of Thin Films / Jozef Keckes, Klaus Martinschitz, Christian Mitterer and Rostislav Daniel -- Surface Treated PDMS by UV-Vis Light Aplied to Microfluidic Device / Seisuke Kano, Sohei Matsumoto and Naoki Ichikawa -- Metal Wafer Bonding for MEMS Applications / Viorel Dragoi, Gerald Mittendorfer, Franz Murauer, Erkan Cakmak and Eric Pabo -- Effect of Process Variables on Glass Frit Wafer Bonding in MEMS Wafer Level Packaging / Sid Sridharan, Jim Henry, John Maloney, Bob Gardner, Keith Mason, Viorel Dragoi, Eric Pabo, Erkan Cakmak and Jurgen Burggraf -- Charging Processes in Silicon Nitride Films for RF-MEMS Capacitive Switches: The Effect of Deposition Method and Film Thickness / Usama Zaghloul, George Papaioannou, Robert Plana, Fabio Coccetti, Patrick Pons and Aissa Belarni -- A Perturbation-Based Method for Extracting Elastic Properties During Spherical Indentation of an Elastic Film/Substrate Bilayer / Jae Hun Kim, Andrew Gouldstone and Chad S. Korach -- Microfabrication of Si/SiO[subscript 2] - Spherical Shells as a Path to Sub-mm[superscript 3] Autonomous Robotic Systems / Vladimir Vasilyev, James R. Reid and Richard T. Webster -- Transport of Charged Species Across Solid-State Nanopores / Daisy Fung, Eyup Akdemir, Michael Vitarelli, Eugene Sosnov and Shaurya Prakash -- Fabrication and Piezoelectric Characterization of AlN Mesa Structures / R. Farrell, A. Kabulski, V. R. Pagan, S. Yeldandi, X. A. Cao, P. Famouri, J. P. Hensel and D. Korakakis -- Investigating the Stress and Crystal Quality of AlN Air-Bridges Through Micro-Raman Scattering / Sridhar Kuchibhatla, L. E. Rodak and D. Korakakis -- Aluminum Nitride Thin Film Based Surface Acoustic Wave Sensors / A. Kabulski, V. R. Pagan, D. Cortes, R. Burda, O. M. Mukdadi and D. Korakakis -- Active Field Effect Capacitive Sensors for High-Throughput, Label-Free Nucleic Acid Analysis / Manu Sebastian Mannoor, Teena James, Dentcho V. Ivanov, Bill Braunlin and Les Beadling -- Growth of Epitaxial Potassium Niobate Film on (100)SrRuO[subscript 3]/(100)SrTiO[subscript 3] by Hydrothermal Method and Their Electromechanical Properties / Mutsuo Ishikawa, Shintaro Yasui, Satoru Utsugi, Takashi Fujisawa, Tomoaki Yamada, Takeshi Morita, Minoru Kurosawa and Hiroshi Funakubo -- Bio-Compatible Micro-Sensor for Blood Pressure Measurement Using SiC Technology / Gary L. Harris, Nupur Basak, Ken Wise and James Griffin -- CMOS-Integrated Stress Sensor Systems for Mechanical Sensing and Packaging Reliability Testing / Oliver Paul, Pascal Gieschke and Benjamin Lemke -- Evaluation of the Mechanical Properties of Aluminum Thin Films as a Function of Strain Rate Using the Wafer-Scale Microtensile Technique / Joao Gaspar, Marek E. Schmidt, Jochen Held and Oliver Paul -- Micro Tensile Tests on Aluminium Thin Films: Tensile Device and In Situ Observations / Michel T. Ignat, Sabine Lay, Francine Roussel d'Herbey, Cedric Seguineau, Christophe Malhaire, Jean Michel Desmarres, Xavier Lafontan and Sebastiano Brida -- Strength and Fatigue Life of Nanocrystalline Titanium/Platinum Multilayer Membranes for Implantable MEMS Reservoir Array Devices / Karl Yoder, John Maloney and Jonathan Coppeta -- Investigation of Gold Sputter Coated Vertically Aligned Multi-Walled Carbon Nanotubes for RF MEMS Contact Surfaces / Esa Yunus, S. Mark Spearing and John McBride -- An Improved Nanotribological System for Hard Disk Drives / Xuan Li and James Economy.

ISBN

• 9781605111117
• 1605111112

OCLC

• ocn426482855
• 426482855
• SCSB-5481155

Owning Institutions

Columbia University Libraries