Research Catalog

Excimer beam applications : 6 September 1988, Boston, Massachusetts

Title
Excimer beam applications : 6 September 1988, Boston, Massachusetts / Anthony N. Pirri, Bernhard P. Piwczyk, chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating organizations, Applied Optics Laboratory/New Mexico State University [and others].
Publication
Bellingham, Wash.. USA : SPIE--The International Society for Optical Engineering, 1988.

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Details

Additional Authors
  • Pirri, Anthony N.
  • Piwczyk, Bernhard P.
  • New Mexico State University. Applied Optics Laboratory.
Description
vi, 128 pages : illustrations; 28 cm.
Series Statement
Proceedings / SPIE--the International Society for Optical Engineering ; v.998
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 998.
Subject
Bibliography (note)
  • Includes bibliographies and index.
ISBN
0819400335
LCCN
88062998
OCLC
  • 19450827
  • ocm19450827
Owning Institutions
Columbia University Libraries