Research Catalog

Microelectronics processing : inorganic materials characterization

Title
Microelectronics processing : inorganic materials characterization / Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society.
Publication
Washington, DC : American Chemical Society, 1986.

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Details

Additional Authors
  • Casper, L. A.
  • American Chemical Society. Division of Industrial and Engineering Chemistry.
Description
x, 443 pages : illustrations; 24 cm.
Series Statement
ACS symposium series, 0097-6156 ; 295
Uniform Title
ACS symposium series ; 295.
Subject
Microelectronics > Materials > Congresses
Bibliography (note)
  • Includes bibliographies and indexes.
ISBN
0841209340
LCCN
85030648
OCLC
  • 13003374
  • ocm13003374
Owning Institutions
Columbia University Libraries