Research Catalog

CMOS gate-stack scaling-- materials, interfaces and reliability implications : symposium held April 14-16, 2009 / editors, Alexander A. Demkov ... [et al.].

Title
CMOS gate-stack scaling-- materials, interfaces and reliability implications : symposium held April 14-16, 2009 / editors, Alexander A. Demkov ... [et al.].

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TextUse in library TK7871.99.M44 C1563 2009gOff-site

Details

Additional Authors
  • Demkov, Alexander A.
  • Materials Research Society. Spring Meeting (2009 : San Francisco, Calif.)
  • Symposium C, "CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications" (2009 : San Francisco, Calif.)
Description
viii, 179 p. : ill.; 24 cm.
Series Statement
MRS proceedings ; v. 1155
Subjects
ISBN
  • 1605111287
  • 9781605111285
Owning Institutions
Columbia University Libraries